【Abstract】　

The dual-frequency capacitively coupled plasma (2f-CCP) source can generate and maintain high-density plasma with high RF electrode and independently control ion energy with low RF electrode. In this work, 2f-CCP was modeled using COMSOL Multiphysics. 2D axisymmetric simulation was performed and the distributions of electron density, electron temperature, etc. were obtained. The structure and characteristics of 2f-CCP were investigated.
 

【Keyword】　

2f-CCP, 2D axisymmetric simulation, COMSOL Multiphysics
 

【Products】

COMSOL Multiphysics,Plasma Module
 

【Information】　

TONG Lizhu, Executive Chief Engineer, Keisoku Engineering System Co., Ltd.